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Al₂O₃ precision alumina ceramic substrate

Alumina ceramic substrate has good insulation, heat insulation and wear resistance. Because of its relatively low price and balanced comprehensive performance, it is one of the most widely used ceramic materials.
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Alumina ceramic substrate has good insulation, heat insulation and wear resistance. Because of its relatively low price and balanced performance, it is one of the most widely used ceramic materials. High-purity (99.5% and above) alumina has good corrosion resistance and plasma etching resistance, and is widely used in pan-semiconductor equipment.

 

主要特征:                                                    

Insulation, heat insulation, wear resistance, corrosion resistance, plasma etching resistance.

 

主要应用:

Pan-semiconductor equipment (LCD and LED manufacturing equipment) spare parts, insulation parts, wear parts, general machinery, hydraulic parts.

 

技术指标 :

Main ingredient content

99%Alumina

99.9%Alumina

Densityg/cc

3.86

3.93

Water absorption%

0

0

Mechanical properties

 Vickers hardnessGPa

13.8

18.5

 Bending strengthMPa

350

350

 Compressive strengthMPa

2250

2600

 Young's modulusGPa

330

380

 Poisson's ratio

0.23

0.23

 Fracture toughnessMPa·m1/2

3

4~5

Thermal characteristics

 Coefficient of linear expansion40~400℃*10-6/℃

7.1

8.2

 Thermal conductivity20℃W/(m·K)

25

32

 Specific heatJ/(kg·K)*103

0.78

0.78

Thermal shock resistance ℃

200

220

Electrical characteristics

 Volume resistivity20℃ Ω·cm

>1014

>1015

 Dielectric strengthKV/mm

16

17

 Dielectric constant

9

9.7

 Dielectric loss factor*10-4

3

1

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